UF3000EX-e
Fully automatic Wafer Prober – also available for numerous special applications
Uncompromising for the throughput
Very flexible for application
Very precise navigation
Non-contact measurement
Very flexible for application
Very precise navigation
Non-contact measurement
- For wafers from 200 to 300 mm diameter – for special types of wafers too
- Newly developed XY stage drive unit and a new algorithm for extremely high throughput
- Improved Z-platform for the highest probe power – for even contact on high pin count probe cards with large surfaces
- 15 inch LCD Touch Screen for easy operation
- Optical Target Scope (OTS) for very precise measurements of the relative positions of Probe Cards and Chucks
- Tri-Colour 3-Level Magnifying for colour recording and 3 enhancement levels
- Navigation Display Function – the user can manage each desired wafer point by simply touching the wafer map
